Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors
نویسندگان
چکیده
Articles you may be interested in Waveguide-integrated photonic crystal spectrometer with camera readout Appl. Subpicosecond high-power mode locking using flared waveguide monolithic quantum-dot lasers Appl.
منابع مشابه
End-coupled optical waveguide MEMS devices in the indium phosphide material system
We demonstrate electrostatically actuated end-coupled optical waveguide devices in the indium phosphide (InP) material system. The design of a suitable layer structure and fabrication process for actuated InP-based waveguide micro-electro-mechanical systems (MEMS) is reviewed. Critical issues for optical design, such as coupling losses, are discussed and their effect on device performance is ev...
متن کاملFabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements
We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching ...
متن کاملRecent Advances in Ultra-High-Speed Waveguide Photodiodes for Optical Communication Systems
This paper describes the recent advances in semiconductor photodiodes for use in ultra-high-speed optical systems. We developed two types of waveguide photodiodes (WG-PD) — an evanescently coupled waveguide photodiode (EC-WG-PD) and a separated-absorption-andmultiplication waveguide avalanche photodiode (WG-APD). The EC-WGPD is very robust under high optical input operation because of its distr...
متن کاملA novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide
Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel an...
متن کاملAn Investigation into Resonant Frequency of Triangular V-Shaped Cantilever Piezoelectric Vibration Energy Harvester
Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...
متن کامل